MEMS (Micro Electro Mechanical Systems)
SK海力士系统集成电路提供基于CMOS工艺以及自主研发的集成MEMS平台的8英寸MEMS代工服务。
8-inch MEMS pure foundry has years of mass production service
- microphone, Pressure Sensor, Motion Sensor etc.
Close cooperation with customers on process development and close protection of customer’s technology information
Provide MEMS Material Library for customer designs
- Poly / TEOS / Low Stress Nitride etc. (Stress, Modulus, Hardness, Reflective Index etc.)
